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Title: Advanced transmission electron microscopy studies in low-energy ion implanted Si
Author: Wang, Te-Sheng.
ISNI:       0000 0001 3559 2665
Awarding Body: University of Sheffield
Current Institution: University of Sheffield
Date of Award: 2002
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No abstract available
Supervisor: Not available Sponsor: Not available
Qualification Name: Thesis (Ph.D.) Qualification Level: Doctoral
EThOS ID:  DOI: Not available
Keywords: Semiconductors