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Title: Lithographic characterisation of a selection of polymeric resists for microlithographic applications.
Author: Murphy, Julian James.
ISNI:       0000 0001 3434 1434
Awarding Body: University of Kent at Canterbury
Current Institution: University of Kent
Date of Award: 1997
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No abstract available
Supervisor: Not available Sponsor: Not available
Qualification Name: Thesis (Ph.D.) Qualification Level: Doctoral
EThOS ID:  DOI: Not available
Keywords: Reprographics