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Title: Process development and characterization of silicon and silicon-germanium grown in a novel single-wafer LPCVD system.
Author: Bonar, Janet Marion.
ISNI:       0000 0001 2443 9534
Awarding Body: University of Southampton
Current Institution: University of Southampton
Date of Award: 1995
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No abstract available
Supervisor: Not available Sponsor: Not available
Qualification Name: Thesis (Ph.D.) Qualification Level: Doctoral
EThOS ID:  DOI: Not available
Keywords: Epitaxial layers