Use this URL to cite or link to this record in EThOS:
Title: Micromachined piezoresistive single crystal silicon cantilever sensors.
Author: Su, Yi.
ISNI:       0000 0001 3488 915X
Awarding Body: University of Southampton
Current Institution: University of Southampton
Date of Award: 1997
Availability of Full Text:
Full text unavailable from EThOS.
Please contact the current institution’s library for further details.
No abstract available
Supervisor: Not available Sponsor: Not available
Qualification Name: Thesis (Ph.D.) Qualification Level: Doctoral
EThOS ID:  DOI: Not available
Keywords: Atomic force microscope