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Title: Measurement and simulation of ion energy distributions in a reactive ion etcher
Author: Dickenson, Andrew C.
ISNI:       0000 0001 3423 8891
Awarding Body: University of Bristol
Current Institution: University of Bristol
Date of Award: 1994
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No abstract available
Supervisor: Not available Sponsor: Not available
Qualification Name: Thesis (Ph.D.) Qualification Level: Doctoral
EThOS ID:  DOI: Not available
Keywords: Semiconductor etching