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Title: The use of electron beam lithography and chemical etching for the fabrication of micromechanical structures.
Author: Lutwyche, Mark Ian.
ISNI:       0000 0001 3614 2092
Awarding Body: University of Cambridge
Current Institution: University of Cambridge
Date of Award: 1991
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No abstract available
Supervisor: Not available Sponsor: Not available
Qualification Name: Thesis (Ph.D.) Qualification Level: Doctoral
EThOS ID:  DOI: Not available
Keywords: Industrial processes & manufacturing processes