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Title: Spectroscopic studies of the reactive ion etching of GaAs in CC12̲F2̲ and CC13̲F plasmas
Author: Wade, I. T.
ISNI:       0000 0001 3549 7422
Awarding Body: University of Bristol
Current Institution: University of Bristol
Date of Award: 1989
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No abstract available
Supervisor: Not available Sponsor: Not available
Qualification Name: Thesis (Ph.D.) Qualification Level: Doctoral
EThOS ID:  DOI: Not available
Keywords: Components