Use this URL to cite or link to this record in EThOS:
Title: Micro and nano-manufacturing process chains : maturity assessment and bulk metallic glass enabled manufacturing routes
Author: Vella, Pierre
ISNI:       0000 0004 5363 0030
Awarding Body: University of Birmingham
Current Institution: University of Birmingham
Date of Award: 2015
Availability of Full Text:
Access from EThOS:
Access from Institution:
The utilisation of process chains is considered as a way forward to achieve cost effective and high throughput production of miniaturised devices. However there are no methodologies to analyse systematically process chains and thus to inform their development and design new ones for microfabrication. Thus, this research first proposes a methodology for assessing the maturity of micro and nano- manufacturing (MNM) technologies and their interfaces in process chains. The applicability and benefits of using it as a tool for assessing the maturity levels of individual processes and chains is demonstrated on existing and emerging MNM platforms. Then, to address the growing requirements for function and length scale integration (FLSI) in devices, two bulk metallic glass (BMG) enabled master-making process chains were designed and validated for serial replication of polymer components with sub-micron and micro size functional features. The empirical research proved that the use of BMG workpieces with their intrinsic atomic level homogeneity enables the integration of complementary MNM technologies for achieving FLSI in replication inserts. Furthermore, it was demonstrated that such process chains can be successfully employed for producing inserts incorporating both micro and nano- scale features that can be utilised for serial production of polymerbased FLSI devices.
Supervisor: Not available Sponsor: University of Malta
Qualification Name: Thesis (Ph.D.) Qualification Level: Doctoral
EThOS ID:  DOI: Not available
Keywords: TJ Mechanical engineering and machinery