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Title: Capacitance-voltage measurements : an expert system approach
Author: Walls, James Austin
Awarding Body: University of Edinburgh
Current Institution: University of Edinburgh
Date of Award: 1990
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The problems for automating capacitance-voltage (C-V) based process monitoring tests are many and varied. The challenges are: interpreting numerical and graphical data, and secondly, performing tests in a correct sequence whilst applying the appropriate simplifying assumptions in the data analysis. A progressive series of experiments using connectionism, pattern-recognition and knowledge-based techniques were researched, culminating with the development of a fully automatic hybrid system for the control of the Hewlett-Packard HP4061 semi-conductor test system. This thesis also includes a substantial review of, and guide to, the theory and practice of the high-frequency, low-frequency and pulsed C-V measurements, conductance-voltage and capacitance-time measurements. Several novel software packages have been written (CV-ASSIST, CV-EXPLORE), including a rule-based expert system (CV-EXPERT) for the control and opportunistic sequencing of measurements and analyses. The research concludes that the new approaches offer the full power and sensitivity of C-V measurements to the operator without the burden of careful procedure, interpretation of the data, and validation of the algorithms used.
Supervisor: Not available Sponsor: Not available
Qualification Name: Thesis (Ph.D.) Qualification Level: Doctoral
EThOS ID:  DOI: Not available