Use this URL to cite or link to this record in EThOS: http://ethos.bl.uk/OrderDetails.do?uin=uk.bl.ethos.660129
Title: Computer instrumentation for voltage contrast measurement in the scanning electron microscope
Author: Nye, Philip
Awarding Body: University of Edinburgh
Current Institution: University of Edinburgh
Date of Award: 1990
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Abstract:
The scanning electron microscope is widely used in industry as a tool in both development and production stages of integrated circuit manufacture, firstly for very high magnification topographical inspection of circuits and secondly for various diagnostic techniques in which the electron beam interacts in some way with the circuit. The most used of these techniques is voltage contrast, in which the scanning electron microscope is used to measure voltages and waveforms within the operating circuit. There are an increasing number of systems available for making voltage contrast measurements. This thesis describes the designing, building, interconnecting and operating of instrumentation to improve the speed and accuracy and above all the usability of a computer based voltage contrast scanning electron microscope. A fast and efficient technique was developed for making accurate quantitative measurements on ICs which avoids the problems of drift due to contamination and charging which usually hamper voltage contrast instruments in real situations. Studies of the mechanisms of oxide charging and its effects on readings are made. Finally a scheme for integration of these methods into a fully computerised scanning electron microscope is proposed.
Supervisor: Not available Sponsor: Not available
Qualification Name: Thesis (Ph.D.) Qualification Level: Doctoral
EThOS ID: uk.bl.ethos.660129  DOI: Not available
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