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Title: Laser diagnosis and computer modelling of C/H/O and C/H/N plasmas used in diamond chemical vapour deposition
Author: Kelly, Mark
Awarding Body: University of Bristol
Current Institution: University of Bristol
Date of Award: 2014
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Laser and optical emission spectroscopies have been employed to study the gas phase chemistry in the growth environment for diamond chemical vapour deposition (CVO) in a microwave (MW) reactor. Computational investigations have also been used to explore the energetics of elementary reactions on a diamond surface, to give insight into which species are likely to incorporate into a growing diamond film. The focus of this thesis is on 0 and N containing CIH plasmas.
Supervisor: Not available Sponsor: Not available
Qualification Name: Thesis (Ph.D.) Qualification Level: Doctoral
EThOS ID:  DOI: Not available