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Title: Physics and fabrication of metallic micro/nanoelectromechanical devices and 3-D photoplastic structures
Author: Teh, Weng Hong
Awarding Body: University of Cambridge
Current Institution: University of Cambridge
Date of Award: 2004
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No abstract available
Supervisor: Not available Sponsor: Not available
Qualification Name: Thesis (Ph.D.) Qualification Level: Doctoral
EThOS ID:  DOI: Not available