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Title: SOI CMOS MEMS flow sensors
Author: Haneef, Ibraheem
Awarding Body: University of Cambridge
Current Institution: University of Cambridge
Date of Award: 2009
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No abstract available
Supervisor: Not available Sponsor: Not available
Qualification Name: Thesis (Ph.D.) Qualification Level: Doctoral
EThOS ID:  DOI: Not available
Keywords: Microelectromechanical systems ; Metal oxide semiconductors ; Complementary ; Silicon-on-insulator technology