Use this URL to cite or link to this record in EThOS: http://ethos.bl.uk/OrderDetails.do?uin=uk.bl.ethos.567116
Title: Focused ion beam technology : implementation in manufacturing platforms and process optimisation
Author: Velkova, Valentina
Awarding Body: Cardiff University
Current Institution: Cardiff University
Date of Award: 2011
Availability of Full Text:
Access through EThOS:
Access through Institution:
Abstract:
Process chains are regarded as viable manufacturing platforms for the production of Microand Nano Technology (MNT) enabled products. In particular, by combining several manufacturing technologies, each utilised in its optimal process window, they could benefit from the unique advantages of high-profile research technologies such as the focused ion beam (FIB) machining. The present work concerns the development of process chains and the investigation of pilot cost-effective implementations of the FIB technology in manufacturing platforms forfabrication of serial replication masters.
Supervisor: Not available Sponsor: Not available
Qualification Name: Thesis (Ph.D.) Qualification Level: Doctoral
EThOS ID: uk.bl.ethos.567116  DOI: Not available
Keywords: TJ Mechanical engineering and machinery ; TS Manufactures
Share: