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Title: Liquid-injection atomic layer deposition of cerium-doped hafnium oxide dielectric films
Author: Pham, Nam Hung
Awarding Body: University of Liverpool
Current Institution: University of Liverpool
Date of Award: 2010
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No abstract available
Supervisor: Not available Sponsor: Not available
Qualification Name: Not available Qualification Level: Doctoral
EThOS ID:  DOI: Not available