Use this URL to cite or link to this record in EThOS:
Title: 3 Dimensional proton beam writing for micro electromechanical systems applications
Author: Igbenehi, Harry
Awarding Body: University of Surrey
Current Institution: University of Surrey
Date of Award: 2009
Availability of Full Text:
Access from EThOS:
No abstract available
Supervisor: Not available Sponsor: Not available
Qualification Name: Thesis (Ph.D.) Qualification Level: Doctoral
EThOS ID:  DOI: Not available