Use this URL to cite or link to this record in EThOS: http://ethos.bl.uk/OrderDetails.do?uin=uk.bl.ethos.502175
Title: Electrical Characterisation and Modelling of Schottkybarrier metal source/drain MOSFETs
Author: Pearman, Dominic
Awarding Body: The University of Warwick
Current Institution: University of Warwick
Date of Award: 2007
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Abstract:
The motivation for the work- presented in this thesis originates in the semiconductor industry's drive to create increasingly scaled transistors. In view of current device dimensions approaching fundamental atomic scales, the industry is looking to alternative structures to provide continued scaling capabilities. The use of metal, usually silicide. source and drain regions to create Schottky barrier (SB-)MOSFETs is one such approach. Previous work on static and RF electrical characterisation as well as simulations has shown this device to provide a number of scaling benefits to the planar MOSFET structure. In addition, it provides simpler and more cost effective fabrication. In this work, the electrical properties under DC bias conditions of p-channel SBMOSFETs with PtSi sources and drains are explored at room temperature and down to 80 K. High room temperature ON currents up to 545 mA/mm and transconductances up to 640 mS/mm for 85 nm gate length devices are measured and performance factors are found to satisfy ITRS recommendations. Increasing silicide anneal temperatures lead to increases in Schottky barrier height and corresponding decreases in drain current are observed. The radio-frequency performance at frequencies up to 110 GHz is studied using a novel measurement deembedding technique. High unity-gain cutoff frequencies up to 71 GHz are extracted. Finally, two-dimensional simulations using the drift-diffusion simulator MEDICI are performed and fitted to the measured electrical characteristics.
Supervisor: Not available Sponsor: Not available
Qualification Name: Thesis (Ph.D.) Qualification Level: Doctoral
EThOS ID: uk.bl.ethos.502175  DOI: Not available
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