Use this URL to cite or link to this record in EThOS: http://ethos.bl.uk/OrderDetails.do?uin=uk.bl.ethos.501725
Title: Investigation of growth and structure of ferroelectric on thin films
Author: Awad, Ahmed
Awarding Body: University of Liverpool
Current Institution: University of Liverpool
Date of Award: 2008
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Abstract:
Non-volatile ferroelectric random access memories (NV-FeRAM) are largely regarded as the ideal non-volatile memory due to their highly desirable performance features. Strontium bismuth tantalate (SBT) is an emerging material for use in NV-FeRAM technology, h this thesis, a "single source" Sr-Ta heterometal precursor and a bismuth organometallic precursor were investigated as potential sources for liquid injection based chemical vapour deposition (CVD) of SBT. Two generic '-vLi processes have been explored, namely: metal organic chemical vapour deposition (MOCVD) and atomic layer deposition (ALD). MOCVD is a well established thin fihn deposition process, whereas at the time of writing, liquid injection ALD is a relatively novel process tool. The effects of post-deposition annealing on the SBT thin fihns deposited by both methods have been characterised using a range of techniques to elucidate the structure and composition of the thin fihn materials. These have mcluded high resolution transmission electron microscopy; medium energy ion scattering; Auger electron spectroscopy; and X-ray diffraction.
Supervisor: Not available Sponsor: Not available
Qualification Name: Thesis (Ph.D.) Qualification Level: Doctoral
EThOS ID: uk.bl.ethos.501725  DOI: Not available
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