Use this URL to cite or link to this record in EThOS: http://ethos.bl.uk/OrderDetails.do?uin=uk.bl.ethos.500975
Title: The application of parametric excitation in an electrostatically actuated mems ring resonator
Author: Harish, Kiran Mysore
Awarding Body: University of Newcastle Upon Tyne
Current Institution: University of Newcastle upon Tyne
Date of Award: 2009
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Abstract:
Research to improve performance in resonant MEMS sensors has concentrated on novel designs, fabrication techniques, actuation and sensing mechanisms, often based on macroscale designs and phenomena which have been studied extensively. This dissertation is about one such actuation mechanism, called parametric excitation, based on the phenomenon of parametric resonance, to enable performance improvement in an electrostatically actuated MEMS ring resonator modulation can be conveniently achieved using electrostatic actuation which is a widely preferred actuation mechanism for MEMS.
Supervisor: Not available Sponsor: Not available
Qualification Name: Thesis (Ph.D.) Qualification Level: Doctoral
EThOS ID: uk.bl.ethos.500975  DOI: Not available
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