Use this URL to cite or link to this record in EThOS: http://ethos.bl.uk/OrderDetails.do?uin=uk.bl.ethos.490034
Title: Ion Energy Distribution Measurement at the Bias Substrate Electrode in Noble and Acetylene Gas Plasmas for Diamond - Like Carbon Deposition
Author: Baby, Aji
Awarding Body: Ulster
Current Institution: Ulster University
Date of Award: 2008
Availability of Full Text:
Access through EThOS:
Abstract:
This thesis describes the characterisation of acetylene-argon plasmas by mass and energy spectrometry as well as infra-red absorption and electrical techniques under conditions favourable to diamond-like carbon deposition. The neutral, positive ionic species and energy distributions measured in an ICP at the rf biased electrode are the first such measurements reported with this mixture under various bias and pressure conditions suited to DLC growth. These are compared to measurements taken in a CCP reactor at a remote location with respect to the driven electrctrode.
Supervisor: Not available Sponsor: Not available
Qualification Name: Thesis (Ph.D.) Qualification Level: Doctoral
EThOS ID: uk.bl.ethos.490034  DOI: Not available
Share: