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Title: Nanocrystalline silicon carbide growth on silicon using ECR-PACVD
Author: Toal, Shane J.
ISNI:       0000 0001 3533 9790
Awarding Body: London South Bank University
Current Institution: London South Bank University
Date of Award: 2006
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No abstract available
Supervisor: Not available Sponsor: Not available
Qualification Name: Thesis (Ph.D.) Qualification Level: Doctoral
EThOS ID:  DOI: Not available