Use this URL to cite or link to this record in EThOS:
Title: Liquid injection MOCVD of hafnium oxide, silicate and aluminate high-k dielectrics
Author: Marshall, Paul Andrew.
Awarding Body: University of Liverpool
Current Institution: University of Liverpool
Date of Award: 2005
Availability of Full Text:
Access through EThOS:
No abstract available
Supervisor: Not available Sponsor: Not available
Qualification Name: Thesis (Ph.D.) Qualification Level: Doctoral
EThOS ID:  DOI: Not available
Keywords: null Liquid dielectrics