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Title: Liquid injection MOCVD of hafnium oxide, silicate and aluminate high-k dielectrics
Author: Marshall, Paul Andrew.
Awarding Body: University of Liverpool
Current Institution: University of Liverpool
Date of Award: 2005
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No abstract available
Supervisor: Not available Sponsor: Not available
Qualification Name: Thesis (Ph.D.) Qualification Level: Doctoral
EThOS ID:  DOI: Not available