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Title: Suppression of boron transient enhanced and thermal diffusion in silicon and silicon germanium by fluorine implantation
Author: El Mubarek, Huda Abdel Wahab Abdel Rahim.
Awarding Body: University of Southampton ;
Current Institution: University of Southampton
Date of Award: 2004
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No abstract available
Supervisor: Not available Sponsor: Not available
Qualification Name: Thesis (Ph.D.) Qualification Level: Doctoral
EThOS ID:  DOI: Not available