Use this URL to cite or link to this record in EThOS:
Title: Antimony implants for ultra-shallow junctions in silicon
Author: Al-Zanki, Talal.
ISNI:       0000 0001 3409 5616
Awarding Body: University of Surrey ;
Current Institution: University of Surrey
Date of Award: 2004
Availability of Full Text:
Access through EThOS:
No abstract available
Supervisor: Not available Sponsor: Not available
Qualification Name: Thesis (Ph.D.) Qualification Level: Doctoral
EThOS ID:  DOI: Not available