Use this URL to cite or link to this record in EThOS: http://ethos.bl.uk/OrderDetails.do?uin=uk.bl.ethos.407575
Title: Spectroscopic and electron impact studies of molecules relevant to plasma etching
Author: Eden, Samuel Peter.
Awarding Body: University College London (University of London)
Current Institution: University College London (University of London)
Date of Award: 2003
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Abstract:
No abstract available
Supervisor: Not available Sponsor: Not available
Qualification Name: Thesis (Ph.D.) Qualification Level: Doctoral
EThOS ID: uk.bl.ethos.407575  DOI: Not available
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