Use this URL to cite or link to this record in EThOS:
Title: Microfluidic control systems in deep etch optical lithography.
Author: Pye, Nathan.
Awarding Body: De Montfort University
Current Institution: De Montfort University
Date of Award: 1999
Availability of Full Text:
Access through EThOS:
No abstract available
Supervisor: Not available Sponsor: Not available
Qualification Name: Thesis (Ph.D.) Qualification Level: Doctoral
EThOS ID:  DOI: Not available
Keywords: ETCHING; MASKING; MICROELECTRONICS; SILICON; ENGINEERING; CONTROL SYSTEMS Solid state physics Electric circuits Electronic circuits