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Title: A silicon micromachined lateral resonant strain gauge pressure sensor.
Author: Welham, Christopher J.
ISNI:       0000 0001 3565 6390
Awarding Body: University of Warwick
Current Institution: University of Warwick
Date of Award: 1996
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No abstract available
Supervisor: Not available Sponsor: Not available
Qualification Name: Thesis (Ph.D.) Qualification Level: Doctoral
EThOS ID:  DOI: Not available
Keywords: Optoelectronics Optoelectronics