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Title: Plasma immersion ion implantation of silicon.
Author: Chen, Shou-Mian.
Awarding Body: University of Surrey
Current Institution: University of Surrey
Date of Award: 1997
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No abstract available
Supervisor: Not available Sponsor: Not available
Qualification Name: Thesis (Ph.D.) Qualification Level: Doctoral
EThOS ID:  DOI: Not available
Keywords: PIII; Ion depth Solid state physics