Use this URL to cite or link to this record in EThOS:
Title: Nanostructure etching with plasmas.
Author: Zachariasse, Jacobus Marinus Frans.
ISNI:       0000 0001 3576 4308
Awarding Body: University of Cambridge
Current Institution: University of Cambridge
Date of Award: 1995
Availability of Full Text:
Full text unavailable from EThOS. Please contact the current institution's library directly if you wish to view the thesis.
No abstract available
Supervisor: Not available Sponsor: Not available
Qualification Name: Thesis (Ph.D.) Qualification Level: Doctoral
EThOS ID:  DOI: Not available
Keywords: Solid-state physics Solid state physics Electric apparatus and appliances Electronic apparatus and appliances