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Title: Tribological study of micromachined electrostatically excited micromotors
Author: Beerschwinger, Ulrich
ISNI:       0000 0001 3453 8050
Awarding Body: Heriot-Watt University
Current Institution: Heriot-Watt University
Date of Award: 1994
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No abstract available
Supervisor: Not available Sponsor: Not available
Qualification Name: Thesis (Ph.D.) Qualification Level: Doctoral
EThOS ID:  DOI: Not available
Keywords: Electronic devices & electromechanical devices Electromechnical devices Electronic apparatus and appliances Materials Biodeterioration Ceramics Ceramics