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Title: Limits of resolution in cathode projection E-beam lithography
Author: Augur, R. A.
Awarding Body: University of Cambridge
Current Institution: University of Cambridge
Date of Award: 1986
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No abstract available
Supervisor: Not available Sponsor: Not available
Qualification Name: Thesis (Ph.D.) Qualification Level: Doctoral
EThOS ID:  DOI: Not available
Keywords: Integrated circuit production Electric apparatus and appliances Electronic apparatus and appliances Particles (Nuclear physics) Nuclear reactions Photography Photography Photocopying