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Title: Chemical relaxation of silane in a radio frequency discharge
Author: Johnson, N. P.
Awarding Body: University of Strathclyde
Current Institution: University of Strathclyde
Date of Award: 1986
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No abstract available
Supervisor: Not available Sponsor: Not available
Qualification Name: Thesis (Ph.D.) Qualification Level: Doctoral
EThOS ID:  DOI: Not available
Keywords: Plasma chemistry of silane Plasma (Ionized gases) Chemistry, Physical and theoretical Solid state physics