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Title: Characterisation and performance of optical lithography systems
Author: Maxwell, Graeme Dunlop
Awarding Body: University of Edinburgh
Current Institution: University of Edinburgh
Date of Award: 1987
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No abstract available
Supervisor: Not available Sponsor: Not available
Qualification Name: Thesis (Ph.D.) Qualification Level: Doctoral
EThOS ID:  DOI: Not available
Keywords: Lithographic use in IC Photography Photography Photocopying Solid state physics Optics