Use this URL to cite or link to this record in EThOS: http://ethos.bl.uk/OrderDetails.do?uin=uk.bl.ethos.380429
Title: Characterisation and performance of optical lithography systems
Author: Maxwell, Graeme Dunlop
Awarding Body: University of Edinburgh
Current Institution: University of Edinburgh
Date of Award: 1987
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Abstract:
No abstract available
Supervisor: Not available Sponsor: Not available
Qualification Name: Thesis (Ph.D.) Qualification Level: Doctoral
EThOS ID: uk.bl.ethos.380429  DOI: Not available
Keywords: Lithographic use in IC Photography Photography Photocopying Solid state physics Optics
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