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Title: Real-time high accuracy measurement of small component dimensions
Author: Moreland, D. J.
Awarding Body: Liverpool Polytechnic
Current Institution: Liverpool John Moores University
Date of Award: 1987
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No abstract available
Supervisor: Not available Sponsor: Not available
Qualification Name: Thesis (Ph.D.) Qualification Level: Doctoral
EThOS ID:  DOI: Not available
Keywords: Electro-optical systems Optoelectronics Optics Computer software