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Title: Techniques and applications of very high resolution electron-beam lithography
Author: Mackie, William Stuart
Awarding Body: University of Glasgow
Current Institution: University of Glasgow
Date of Award: 1984
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Summary available: p. 1-2.
Supervisor: Not available Sponsor: Not available
Qualification Name: Thesis (Ph.D.) Qualification Level: Doctoral
EThOS ID:  DOI: Not available
Keywords: T Technology (General) Photography Photography Photocopying Electric apparatus and appliances Electronic apparatus and appliances