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Title: Characterisation of reactive ion etch processes for ternary III-V semiconductors.
Author: Bunting, Andrew Stuart.
Awarding Body: University of Glasgow
Current Institution: University of Glasgow
Date of Award: 1996
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No abstract available
Supervisor: Not available Sponsor: Not available
Qualification Name: Thesis (Ph.D.) Qualification Level: Doctoral
EThOS ID:  DOI: Not available
Keywords: Physical chemistry