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Title: Novel techniques for the control of the properties of reactively sputtered thin films.
Author: Danson, Nigel.
ISNI:       0000 0001 3404 4333
Awarding Body: Loughborough University of Technology
Current Institution: Loughborough University
Date of Award: 1996
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No abstract available
Supervisor: Not available Sponsor: Not available
Qualification Name: Thesis (Ph.D.) Qualification Level: Doctoral
EThOS ID:  DOI: Not available
Keywords: Magnetron; Ion Plasma (Ionized gases)