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Title: Plasma assisted deposition using an unbalanced magnetron.
Author: Ja'fer, Hussein Abidjwad.
ISNI:       0000 0001 3587 7281
Awarding Body: Loughborough University of Technology
Current Institution: Loughborough University
Date of Award: 1993
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No abstract available
Supervisor: Not available Sponsor: Not available
Qualification Name: Thesis (Ph.D.) Qualification Level: Doctoral
EThOS ID:  DOI: Not available
Keywords: Magnetron sputtering Solid state physics Plasma (Ionized gases)