Use this URL to cite or link to this record in EThOS: http://ethos.bl.uk/OrderDetails.do?uin=uk.bl.ethos.356942
Title: Rapid thermal processing for ULSI technology.
Author: Ling, Edmond Tiong Giam.
ISNI:       0000 0001 3610 6673
Awarding Body: Queen's University of Belfast
Current Institution: Queen's University Belfast
Date of Award: 1988
Availability of Full Text:
Full text unavailable from EThOS. Please contact the current institution's library directly if you wish to view the thesis.
Abstract:
No abstract available
Supervisor: Not available Sponsor: Not available
Qualification Name: Thesis (Ph.D.) Qualification Level: Doctoral
EThOS ID: uk.bl.ethos.356942  DOI: Not available
Keywords: Transistors; Semiconductors Solid state physics Electric apparatus and appliances Electronic apparatus and appliances Electric circuits Electronic circuits
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