Use this URL to cite or link to this record in EThOS: http://ethos.bl.uk/OrderDetails.do?uin=uk.bl.ethos.343114
Title: Quantitative depth profiling of near surface semiconductor structures using ultra low energy SIMS analysis.
Author: Elliner, David I.
ISNI:       0000 0001 3444 3705
Awarding Body: University of Warwick
Current Institution: University of Warwick
Date of Award: 1999
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Abstract:
No abstract available
Supervisor: Not available Sponsor: Not available
Qualification Name: Thesis (Ph.D.) Qualification Level: Doctoral
EThOS ID: uk.bl.ethos.343114  DOI: Not available
Keywords: MASS SPECTROSCOPY; SURFACE AREA; LAYERS; SEMICONDUCTOR MATERIALS; SPATIAL DISTRIBUTION; DEPTH; ION IMPLANTATION; SOLID CLUSTERS Solid state physics
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