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Title: The nitridation of silicon under high purity conditions
Author: Lu, H. Y.
ISNI:       0000 0001 3613 5140
Awarding Body: University of Leeds
Current Institution: University of Leeds
Date of Award: 1982
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No abstract available
Supervisor: Not available Sponsor: Not available
Qualification Name: Thesis (Ph.D.) Qualification Level: Doctoral
EThOS ID:  DOI: Not available
Keywords: Physical chemistry