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Title: High rate reactive magnetron sputtering.
Author: Spencer, Alaric Graham.
ISNI:       0000 0001 2431 968X
Awarding Body: Loughborough University of Technology
Current Institution: Loughborough University
Date of Award: 1988
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No abstract available
Supervisor: Not available Sponsor: Not available
Qualification Name: Thesis (Ph.D.) Qualification Level: Doctoral
EThOS ID:  DOI: Not available
Keywords: Thin film production Solid state physics