Use this URL to cite or link to this record in EThOS: http://ethos.bl.uk/OrderDetails.do?uin=uk.bl.ethos.328037
Title: Spectroscopic studies of the etching of Si and Al in Cl←2 and CCl←4 plasmas.
Author: Clarke, Peter E.
Awarding Body: University of Bristol
Current Institution: University of Bristol
Date of Award: 1988
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Abstract:
No abstract available
Supervisor: Not available Sponsor: Not available
Qualification Name: Thesis (Ph.D.) Qualification Level: Doctoral
EThOS ID: uk.bl.ethos.328037  DOI: Not available
Keywords: Plasma physics & gas discharges Plasma (Ionized gases) Solid state physics Electric apparatus and appliances Electronic apparatus and appliances
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