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Title: A study of the role of low energy ions in causing damage to III-V semiconductors in practical ion etching systems.
Author: Deng, Ligang.
Awarding Body: University of Glasgow
Current Institution: University of Glasgow
Date of Award: 2000
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No abstract available
Supervisor: Not available Sponsor: Not available
Qualification Name: Thesis (Ph.D.) Qualification Level: Doctoral
EThOS ID:  DOI: Not available
Keywords: Dry etching; Photoluminesence; Quantum well Electric apparatus and appliances Electronic apparatus and appliances Optoelectronics Optics