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Title: Plasma anodisation of silica for VLSI.
Author: Taylor, Stephen.
Awarding Body: University of Liverpool
Current Institution: University of Liverpool
Date of Award: 1988
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No abstract available
Supervisor: Not available Sponsor: Not available
Qualification Name: Thesis (Ph.D.) Qualification Level: Doctoral
EThOS ID:  DOI: Not available
Keywords: Components Electric apparatus and appliances Electronic apparatus and appliances Solid state physics Plasma (Ionized gases)