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Title: Aluminium oxynitride thin films by reactive magnetron sputtering and their applications.
Author: Gou, Zhenhui.
ISNI:       0000 0001 3507 2248
Awarding Body: University of Paisley
Current Institution: University of the West of Scotland
Date of Award: 2000
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No abstract available
Supervisor: Not available Sponsor: Not available
Qualification Name: Thesis (Ph.D.) Qualification Level: Doctoral
EThOS ID:  DOI: Not available
Keywords: ALUMINIUM; NITRATES; films; SPUTTERING; MAGNETRONS Optics Solid state physics Coatings Paint