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Title: An investigation of the low energy RF plasma bombardment of thin film tin oxide surfaces.
Author: Archer, Caroline Jane.
Awarding Body: University of Ulster
Current Institution: Ulster University
Date of Award: 2000
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No abstract available
Supervisor: Not available Sponsor: Not available
Qualification Name: Thesis (Ph.D.) Qualification Level: Doctoral
EThOS ID:  DOI: Not available
Keywords: ETCHING; TIN OXIDES; plasma; RF SYSTEMS; FILMS Optoelectronics Plasma (Ionized gases)