Use this URL to cite or link to this record in EThOS: http://ethos.bl.uk/OrderDetails.do?uin=uk.bl.ethos.310413
Title: The chemical and electrochemical anisotropic etching of silicon.
Author: Dixon, Elizabeth.
Awarding Body: University of Portsmouth
Current Institution: University of Portsmouth
Date of Award: 1997
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Abstract:
No abstract available
Supervisor: Not available Sponsor: Not available
Qualification Name: Thesis (Ph.D.) Qualification Level: Doctoral
EThOS ID: uk.bl.ethos.310413  DOI: Not available
Keywords: ETCHING; SILICON; INTEGRATED CIRCUITS; EDTA; POTASSIUM HYDROXIDES; PROPANOLS; WATER Solid state physics Chemical engineering
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