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Title: Excimer laser micromachining of inorganic materials
Author: Key, Philip Henry
Awarding Body: University of Hull
Current Institution: University of Hull
Date of Award: 1989
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No abstract available
Supervisor: Dyer, Peter E. ; Greenough, R. D. Sponsor: H. Tinsley plc ; G.E.C. Hirst ; Science and Engineering Research Council
Qualification Name: Thesis (Ph.D.) Qualification Level: Doctoral
EThOS ID:  DOI: Not available
Keywords: Applied physics Optics Solid state physics Chemical engineering