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Title: Studies of low pressure chemical vapour deposition (LPCVD) of polysilicon.
Author: Trainor, Michael.
ISNI:       0000 0003 6701 2228
Awarding Body: University of Strathclyde
Current Institution: University of Strathclyde
Date of Award: 1990
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No abstract available
Supervisor: Not available Sponsor: Not available
Qualification Name: Thesis (Ph.D.) Qualification Level: Doctoral
EThOS ID:  DOI: Not available
Keywords: Solid-state physics Solid state physics Chemical engineering